5 Easy Facts About gas distributor functions Described
5 Easy Facts About gas distributor functions Described
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FIG. 2C exhibits a cross sectional perspective of a connector 250 for fuel distributor 200 as in FIGS. 2A and 2B linked to a help 248 inside of a semiconductor process chamber In line with an embodiment from the present creation. Aid 248 includes a channel 260 that may be connected to first fluid offer line and tailored to move the 1st fluid, and also a channel 264 that may be connected to a 2nd fluid provide line and adapted to pass the second fluid. The very first fluid offer line, for example a fuel shipping and delivery line as explained higher than, is connected to a move controller under control of the system controller as explained higher than. The second fluid provide line, such as a independent gasoline supply line as described previously mentioned, is linked to a flow controller beneath Charge of the system controller as explained earlier mentioned. Thus, the system controller can individually Regulate the move of the very first fluid by means of channel 260 as well as flow of the next fluid as a result of channel 264.
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A primary fluid source line is coupled to the very first channel formed in the human body of gasoline distributor. A 2nd fluid source line is coupled to the second channel fashioned in the body with the gasoline distributor to individual the next fluid from the initial fluid while the fluids are passed from the provision lines to your openings. The openings are adapted To combine the first fluid with the 2nd fluid outdoors your body with the gas distributor above the wafer help.
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two. The gasoline distributor of assert one wherein the connector is adapted to attach the fuel distributor and seal the channel to the supply line with no more than a 50 % change on the gas distributor.
g., cavity 153 and applicator tube 155) needs to be proof against attack because of the plasma. Producing the cleansing plasma inside a distant cavity lets the use of an economical microwave generator and will not subject chamber parts to the temperature, radiation, or bombardment on the glow discharge that may be existing within a plasma fashioned in situ. As a result, somewhat sensitive parts, such as electrostatic chuck one hundred twenty, do not have to be included having a dummy wafer or usually guarded, as can be required using an in situ plasma cleansing process.
One way to deliver a relentless match, and efficiently disable the RF Manage circuit from tuning the matching network, should be to set the reflected electricity Restrict previously mentioned any expected price of reflected electric power. This may aid stabilize a plasma underneath some disorders by Keeping the matching network regular at its newest condition.
In lots of embodiments, gas distributor 111 comprises a first channel tailored to inject a resource gasoline, for example SiH4, in addition to a second channel adapted to inject an oxidizer gas, for example O2, which undergoes a chemical reaction While using the resource gas to kind SiO2 over the substrate. Function in relation with embodiments with the current creation suggests more info that these kinds of gas distributors can provide a uniform deposition of SiO2 that avoids silicon loaded deposition within the central area from the substrate, for instance embodiments that use gas rings with nozzles distributed throughout the substrate close to the side walls of the chamber.
manufactured from paper, plastic, or metal to vibrate promptly. 3. By yourself: Produce at least two additional paths about the Gizmo. List the energy conversions that materialize alongside
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A action 570 mixes the initial fluid and the here second fluid from the chamber outdoors the human body on the gas distributor. A phase 580 deposits reactive products around the wafer with HDP/CVD process. A move 590 eliminates the semiconductor wafer from the chamber. It should be mentioned that a lot of the actions revealed in FIG. 5 are executed at the same time or significantly the identical time so that no less than a portion of Just about website every stage is done whilst no less than a portion of A different stage is done. For instance, HDP voltage is placed on the coils with move 540, even though the first fluid passes through the 1st channel with step 550 and the next fluid passes in the second channel more info with phase 560 and reactive products are deposited about the wafer with move 580.
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FIG. 6A exhibits a gasoline distributor with a primary channel that comprises a number of branches that stretch to your plurality of first openings as well as a next channel with various branches that reach to some plurality of next openings In keeping with an embodiment on the existing creation;